JPH01167378U - - Google Patents
Info
- Publication number
- JPH01167378U JPH01167378U JP1988064326U JP6432688U JPH01167378U JP H01167378 U JPH01167378 U JP H01167378U JP 1988064326 U JP1988064326 U JP 1988064326U JP 6432688 U JP6432688 U JP 6432688U JP H01167378 U JPH01167378 U JP H01167378U
- Authority
- JP
- Japan
- Prior art keywords
- fine movement
- casing
- adjustment screw
- jig
- preload adjustment
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000036316 preload Effects 0.000 claims description 3
Landscapes
- Apparatuses For Generation Of Mechanical Vibrations (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988064326U JPH0640477Y2 (ja) | 1988-05-16 | 1988-05-16 | 圧電式微動アクチュエータ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1988064326U JPH0640477Y2 (ja) | 1988-05-16 | 1988-05-16 | 圧電式微動アクチュエータ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPH01167378U true JPH01167378U (en]) | 1989-11-24 |
JPH0640477Y2 JPH0640477Y2 (ja) | 1994-10-19 |
Family
ID=31289797
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1988064326U Expired - Lifetime JPH0640477Y2 (ja) | 1988-05-16 | 1988-05-16 | 圧電式微動アクチュエータ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0640477Y2 (en]) |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3349259A (en) | 1965-05-27 | 1967-10-24 | Kistler Instr Corp | Piezoelectric pressure transducer |
JP5910155B2 (ja) | 2012-02-22 | 2016-04-27 | 株式会社明電舎 | 電力変換装置の電圧制御装置 |
-
1988
- 1988-05-16 JP JP1988064326U patent/JPH0640477Y2/ja not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
JPH0640477Y2 (ja) | 1994-10-19 |